Selective Carbon Material Engineering for Improved MEMS and NEMS
نویسندگان
چکیده
منابع مشابه
From MEMS to NEMS with carbon.
Our work in carbon-microelectromechanical systems (C-MEMS) suggests that C-MEMS might provide a very interesting material and microfabrication approach to battery miniaturization, active DNA arrays and a wide variety of chemical and biological sensors. In C-MEMS, photoresist is patterned by photolithography and subsequently pyrolyzed at high-temperatures in an oxygen-free environment. We establ...
متن کاملC-MEMS and C-NEMS
Our work in carbon-microelectromechanical systems (C-MEMS) suggests that C-MEMS might provide a very interesting material and microfabrication solution to the battery miniaturization problem, active DNA arrays and a wide variety of chemical and biological sensors. We established that it is possible to use C-MEMS to create very high aspect ratio carbon structures (e.g. posts with an aspect ratio...
متن کاملSimulation and experiments on friction and wear of diamond: a material for MEMS and NEMS application
To date most of the microelectromechanical system (MEMS) devices have been based on silicon. This is due to the technological know-how accumulated on the manipulation, machining and manufacturing of silicon. However, only very few devices involve moving parts. This is because of the rapid wear arising from high friction in these silicon-based systems. Recent tribometric experiments carried out ...
متن کاملUltrananocrystalline and Nanocrystalline Diamond Thin Films for MEMS/NEMS Applications
Anirudha V. Sumant, Orlando Auciello, Robert W. Carpick, Sudarsan Srinivasan, and James E. Butler of smooth diamond films with uniform thickness and micro/nanostructure over large area substrates (≥150 mm diameter wafer), as recently demonstrated.1 Growth of thin (0.1 to 5 micron thick) diamond films on nondiamond substrates, typically conventional electronic substrates such as Si, SiC, and AlN...
متن کاملFIB/SEM technology in NEMS/MEMS fabrication and investigation
FEI Helios NanoLab 600i microscope with Kleindiek MM3A-EM micromanipulators, controlled by microscope PC connected to Keithley 2400 Source Meter, has been used in our experiments. Due to limited space only several examples of FIB/SEM processes that have been conducted are presented here. They proof the great advantage of this technology in modifying single structures in short time. Streszczenie...
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ژورنال
عنوان ژورنال: Micromachines
سال: 2019
ISSN: 2072-666X
DOI: 10.3390/mi10080539